ONTO INNOVATION INC

WILMINGTON, MA, 01887

Subcontracting experience

5 records from government sources. Past participation is not evidence of current teaming interest.

Role	Agency	Description	Vehicle	Obligated	Action date	Period
Subcontractor	National Aeronautics and Space Administration	PHASECAM 6100 CAMERA AND ACCESSORIES (QTY 1) ASES001704 Parent award context Parent award agency: National Aeronautics and Space Administration · National Aeronautics and Space Administration Parent award NAICS: 541715 Parent award performance state: MD Parent award description: THE MIST II CONTRACT WILL PROVIDE MULTIDISCIPLINARY ENGINEERING TASK ORDERS FOR THE FORMULATION, DESIGN, DEVELOPMENT, FABRICATION, INTEGRATION, TESTING, VERIFICATION, AND OPERATIONS OF SPACE FLIGHT AND GROUND SYSTEM HARDWARE AND SOFTWARE. View parent award on USAspending	—	$489,225	Mar 31, 2026	— – —
Subcontractor	National Aeronautics and Space Administration	LENSES,OPTICAL INSTRUMENTS. 4203170698 Parent award context Parent award agency: National Aeronautics and Space Administration · National Aeronautics and Space Administration Parent award NAICS: 541715 Parent award performance state: CA Parent award description: PROVIDE THREE LANDIS FLIGHT INSTRUMENT UNITS AND RELATED SERVICES, INCLUDING THE DESIGN, ENGINEERING ANALYSES, DEVELOPMENT, FABRICATION, INTEGRATION, ALGORITHM DEVELOPMENT, TEST, EVALUATION, DELIVERY, AND SUPPORT FOR THE LANDIS View parent award on USAspending	—	$34,870	Sep 9, 2025	— – —
Subcontractor	Department of Defense	ELECTRONIC MANUFACTU 5300113363 Parent award context Parent award agency: Department of Defense · Department of the Air Force Parent award NAICS: 541330 Parent award performance state: CA Parent award description: DEFENSE SUPPORT PROGRAM OPERATIONS AND MAINTENANCE ENGINEERING SERVICES View parent award on USAspending	—	$71,000	Aug 31, 2024	— – —
Subcontractor	Department of Defense	SOFTWARE MAINTENANCE 7000594814 Parent award context Parent award agency: Department of Defense · Department of the Air Force Parent award NAICS: 541712 Parent award performance state: MA Parent award description: IGF::CT::IGF TASK ORDER 0001 FOR DOD LINE FUNDING View parent award on USAspending	FA870215D0001USAspending	$64,217	Sep 28, 2023	— – —
Subcontractor	Department of Defense	SOFTWARE MAINTENANCE 7000576072 Parent award context Parent award agency: Department of Defense · Department of the Air Force Parent award NAICS: 541712 Parent award performance state: MA Parent award description: IGF::CT::IGF TASK ORDER 0001 FOR DOD LINE FUNDING View parent award on USAspending	FA870215D0001USAspending	$38,442	Apr 6, 2023	— – —

Contract vehicles are shown only when present in the source record. Linked award numbers and vehicles open the authoritative record on USAspending.gov.

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Identifiers

UEI: K41YV73EPTH9
CAGE: 62055
Website: https://ontoinnovation.com/

NAICS codes

333242Semiconductor Machinery ManufacturingPrimary(definition)
334519Other Measuring and Controlling Device Manufacturing(definition)

Data sources

SAM.gov monthly extract
ID K41YV73EPTH9 · fetched Oct 25, 2026 · source
SBA Small Business Search
ID K41YV73EPTH9 · fetched Oct 26, 2026 · source
USAspending.gov
ID recipient:K41YV73EPTH9 · fetched Oct 26, 2026 · source

Last synced Oct 25, 2026 · profile updated Oct 25, 2026

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Government-sourced data comes from SAM.gov, SBA and USAspending.gov and is attributed to its source. Items marked company-reported were provided by the company and are verified by FedSub only where labeled. FedSub is a private company and is not affiliated with SBA, GSA/SAM.gov, or any government agency.